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8000 Series High Accuracy Resonant Pressure Sensor

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Raise the bar in precision pressure measurement with the new 8000 Series

The RPS/DPS 8000 resonant silicon pressure sensor was the first pressure sensor to incorporate GE’s TERPS technology platform. TERPS (Trench Etched Resonant Pressure Sensor) offers an order of magnitude greater performance over current technologies to provide the highest accuracy and stability sensor available. It also significantly extends the pressure range capability conventionally associated with resonating pressure technology (RPT) sensors and enables robust packaging, suitable for harsh environments.

The new RPS/DPS 8100 resonant pressure sensor introduces an exposed construction for low g sensitivity and exceptional performance around barometric pressures.

In addition, the 8000 Series product line offers a wide range of pressure and electrical connections to allow flexible customization in a wide range of applications, from aerospace to subsea and from process engineering to industrial instrumentation.

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Features

Designed with brand new TERPS technology

• High precision, ±0.01% FS over compensated temperature range

• High stability, ±100 ppm FS/year

• Barometric pressure to 0.1mbar (0.1hpa)

• Pressure ranges, 2 bar (30 psi) up to 70 bar (1000 psi) absolute

• Wide temperature range,  -40 °C to +85 °C (-40 °F to 185 °F)

• Media isolated construction, suitable for use in harsh environments

• Exposed construction for low g sensitivity

• Multiple output configurations, TTL and Diode, RS-232 and RS-485

• Wide selection of pressure and electrical connections to suit specific requirements


 

Applications

Oil & Gas

The increasing demand to recover oil in a clean, safe and efficient manner drives the need to measure during the different phases of exploration, drilling, production and transmission of upstream and midstream operations to very high levels of precision.The RPS/DPS 8000 pressure sensor provides the solution.

Applications include:BR-126_Oil-and-Gas_13

  • Wellhead monitoring
  • Custody transfer

 

 

 


Aerospace

The increasing demand for performance of aircraft, both military and commercial, requires that systems operate at higher efficiency levels, needing more accurate measurement and control. 

Applications include:

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  • Air data test systems
  • Environmental control systems
  • Hydraulic control systems
  • Flight test
  • Ground test
  • Avionics ground support equipment


Environmental Research

Growing concerns over global climate change and the need to understand its potential impacts increase the scientific community's interest in getting the most accurate and reliable data possible in order to provide the best results and conclusions.

Applications include:   

     Oceanography                                                      emvironmet-resesrch

  • Wave and tide gauges
  • Data buoys–moored and drifting
  • Tsunami early warning systems
  • Sea bed mapping
  • Remote Operated Vehicles (ROVs)
  • Autonomous Underwater Vehicles (AUVs)


     Meteorology                                                     

  • Remote weather monitoring stations
  • Surface data buoys
  • GPS meteorology

 

 

 

 

      Hydrology                                                     

  • Dam and reservoir level sensing
  • Stream gauging
  • Hydrostatic tank gauging
  • Manometer replacements

 

 

 

Power Generation

The world’s energy consumption demand increases at a rate that continues to outpace supply. The RPS/DPS 8000 pressure sensor is designed for applications that drive efficiency in the control of fuel and for other critical monitoring of flow to gas powered turbines. The sensor also has potential for nuclear, wind, and geothermal energy applications.

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Industrial

Applications within this broad market segment are again driven by the need for improved testing and improved efficiencies. Automotive test, test benches, leak detection systems, and industry R&D efforts all center around improved results and performance, which require higher levels of measurement accuracy.

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Metrology

The ability to calibrate and validate performance of measurement equipment has always been an integral part of ensuring best results. As measurement devices increase in performance, so must the instruments that calibrate and validate them. The RPS/DPS 8000 finds application as an internal or external reference standard for laboratory and portable calibration instrumentation.

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GE's PACE 6000 pressure controller/indicator

 

 

 

 

 

 

 

 

 

 

Specifications

When developing this new TERPS technology, our objective was to offer a sensor with the  highest level of accuracy and stability, available over wide pressure and temperature ranges, and in a robust and reliable package for harsh environments.


The Highest Levels of Accuracy and Stability

Silicon for improved performances:

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Example Si machining possible with DRiE
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Water in DRiE process
  • We have fully leveraged the mechanical properties of silicon in making the TERPS resonator element
  • To optimize and balance the design of resonator, we have used Deep Reactive Ion Etching (DRIE) silicon processing  techniques. DRIE gives the ability to design structures with complex and arbitrary geometries.
  • Precision of 0.01% FS (100 ppm)
  • Stability of 0.01% FS per annum (100 ppm)

 













Over Wide Pressure and Temperature Ranges

The silicon fusion bonding process:  

  • TERPS is dependent only on the mechanical properties of silicon allowing use over wide temperature ranges up to -40 to 85 °C (-40 to 185 °F).
  • The design also allows different thicknesses of silicon to be bonded to the resonator, through the use of Silicon Fusion Bonding (SFB), that allows use over a wide range of pressures,  up to 70 bar (1000 psi)

 

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                                   Cross-section of TERPS sensor element                    
Cross-section of SFB Si Payers

In Robust and Reliable Packaging

Deep Reactive Ion Etching (DRiE) gives the ability to design structures with complex and arbitrary geometries and can be used to make the resonator in a horizontal plane. This is necessary to make the resonator rigid to minimize energy loss and enables the use of an oil filled isolated construction.

The fully welded TERPS module gives top level design engineers the freedom to package the sensor in standard material. The product is housed in a 316L stainless steel module and the conditioning electronics in a 25 mm body-tube.  A range of pressure and electrical connections is offered.

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Download


Descriptions English Français
8000 Series user manual acrobat-reader
RPS/DPS 8000 datasheet acrobat-reader acrobat-reader
RPS/DPS 8100 datasheet acrobat-reader
TERPS White Paper acrobat-reader


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