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P122

P122: Silicon Pressure Sensors

The P122 piezoresistive pressure sensors are offered in a miniature 0.10 in x 0.10 in (2.5 mm x 2.5 mm) die. When excited with 1.0 mA, the P122 produces a millivolt output that is proportional to input pressure.



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Features

• High reliability, solid state silicon pressure sensors

• Available in absolute pressure version

• Standard pressure ranges: 0 to 1700, 0 to 3500, 0 to 17000 and 0 to 350000 kPa

• Nonlinearity < 0.25% FSO

• 2X overpressure limit


Applications

• Process control systems

• Pneumatic controls

• Biomedical instruments

• Hydraulic systems


Specifications

The P122 piezoresistive pressure sensors are offered in a miniature 0.10 in x 0.10 in (2.5 mm x 2.5 mm) die. When excited with 1.0 mA, the P122 produces a millivolt output that is proportional to input pressure. The P122 is available as an absolute pressure sensor where the media pressure is referenced to an internal vacuum sealed in the die. With GE’s SenStable® process, the P122 will provide very good long-term stability and excellent repeatability.

Parameter Value Units Notes

General

Pressure Range 1700 KPaG ≈250 psi (-1.03 bar)

3500 KPaA ≈500 psi (-2.06 bar)

7000 KPaA ≈1000 psi (-6.89 bar)

35000 KPaA ≈5000 psi

Maximum Overpressure 2X rated pressure

Electrical @ 25°C (77°F) unless otherwise stated

Excitation 1.0 mA 10 VDC Maximum

Input Impedance 5000 ±20% Ω

Output Impedance 5000 ±20% Ω

Environmental

Temperature Range

Operating -40 to 257 °F (-40°C to 125°C)

Storage (undiced) -67 to 302 °F (-55°C to 150°C)

Mechanical

Weight 0.00008 lb (0.04 g)

Media Compatibility Clean dry air,

non-corrosive gases

Performance Parameters (1)

Value (6) Units Notes

Zero Offset ±50 mV 1

Full Scale Output (FSO) 240 ±35 mV 6

Linearity ±0.25 %FSO 2

Pressure Hysteresis ±0.05 %FSO

Temperature Coefficient ±30 :V/V/°C 3 of Zero

Temperature Coefficient 0.27 % /°C 3 of Resistance

Temperature Coefficient -0.19 %FSO/°C 3 of Sensitivity

Thermal Hysteresis of Zero 0.2 %FSO 3

Long Term Stability of FSO 0.2 %FSO 4

1. 0 KPaA for absolute sensors, 0 KPaG for differential or gage sensors.

2. Best fit straight line.

3. Between 32°F and 158°F (0°C and 70°C).

4. Typical value over one year.

5. All values measured a 77°F (25°C) and 1 mA excitation, unless otherwise noted.

6. 133 ± 33 mV for 51009 and 51013

P122-1


P122-2

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